33000rpm Water Cooling Turbomolecular Pump with 1401L/s Pumping Speed for Industrial Plating

Maglev Pump, CXF-200/1401, Water cooling, On board

The electromagnetic bearing, also called "active magnetic levitated bearings," consists of a magnetic bearing, sensor, and control system. This design provides dynamic response and timely adjustment, ensuring high-speed shafting and reliable operation.

Magnetically levitated molecular pumps feature shafting supported by magnetic force. This series of pumps was developed by KYKY to meet application requirements in modern semiconductor manufacturing, chip manufacturing, industrial plating, and scientific instruments.

• Control Technology for Magnetic Bearing: Features a 5-axis magnetically levitated design with dynamic active closed-circuit magnetic suspension control technology for stable levitation and reliable high-speed shafting operation.
• Motor Drive Control Technology: Utilizes high-efficiency high-speed DC motor and servo control system for maximum energy efficiency, automatic shafting speed compensation, stable startup, and reliable operation.
• Carbon Fiber Composite Rotor Technology: Turbo rotors made from high-strength aluminum alloy and lightweight carbon fiber composite, offering reduced weight and improved strength for high rotating speed, performance, and reliability.
• Corrosion Resisting Technology: Chamber parts treated with special processes to resist corrosive gases in semiconductor manufacturing, with inert gas protection for low vacuum parts enabling stable long-term corrosive gas extraction.
• Heating Temperature Control System: Equipped with electric heater and temperature controller to monitor and control cooling water, air-borne heating, electric heating, and protective gas heat, maintaining optimal temperature for special processes like etching.

1. Zero friction during operation with low power consumption
2. Easy acquisition of clean high vacuum and ultrahigh vacuum without pump lubrication
3. Capable of long-term corrosive gas extraction
4. High safety and long service life with precision ceramic ball bearing protection
5. Power generating function during sudden power-off situations